Dynamic Failure Analysis & Design Debug

Real-Time Transistor Waveform Acquisition Using Laser and E-Beam Technologies

Overview

Dynamic Failure Analysis (DFA) and Design Debug techniques provide direct visibility into transistor activity while devices operate under real-world conditions.

As semiconductor technologies continue to shrink, identifying marginal failures becomes increasingly challenging. Many defects are associated with subtle voltage fluctuations, timing violations, or intermittent behaviors that cannot be detected using conventional static analysis methods.

Successful root cause isolation requires precise failure localization, access to deeply embedded circuitry, and measurement techniques capable of capturing dynamic electrical behavior without modifying or masking the defect.

Sector Technologies provides advanced laser-based and electron-beam based waveform acquisition solutions that enable engineers to accelerate failure analysis, validate silicon performance, optimize yield, and support technology development from legacy CMOS technologies through advanced FinFET nodes.

 

Core Technologies

Near Infrared (NIR), Visible Laser, and Electron Beam based techniques enable real-time observation of transistor switching activity on electrically active devices.

These technologies provide non-destructive access to internal circuit behavior and support applications ranging from failure analysis and design debug to process development and hardware security investigations.

Applicable across technology nodes from mature CMOS processes to advanced FinFET architectures.

Solutions

The Meridian product family delivers a comprehensive portfolio of Dynamic Electrical Failure Analysis (EFA) solutions, spanning Near Infrared, Visible Laser, and Electron Beam based technologies.

Depending on the required spatial resolution and technology node, signal acquisition can be performed from tens of kilohertz up to multi-gigahertz frequencies, from micron scale down to nano scale.

Integrated CAD navigation through NEXS® and Avalon® provides rapid signal localization, efficient navigation, and accurate probing registration

Meridian IV

  • Integrated EMMI and LSM platform supporting both static and dynamic EFA techniques
  • Near Infrared Laser Voltage Imaging and Probing (LVI/LVP)
  • Optimized for technology nodes down to 22 nm
  • Spatial resolution down to 220 nm
  • Datasheet

Meridian EX

Advanced Electron Beam platform for Dynamic EFA and Design Debug 

E-Beam Voltage Imaging and Probing (EVI/EVP)

Optimized for leading-edge technology nodes below 7 nm 

Spatial resolution down to 20 nm

 

Datasheet

Meridian 7

  • Laser Scanning Microscope platform combining Near Infrared and Visible laser sources 
  • Designed for advanced Dynamic EFA and Design Debug applications
  • NIR and Visible (785 nm) Laser Voltage Imaging and Probing (LVI/LVP) 
  • Optimized for technology nodes down to 7 nm
  • Spatial resolution down to 140 nm
  • From 10’s of kHz up to GHz capability
  • CAD link (NEXS/Avalon) available for probing location registration

Dynamic analysis applications

Dynamic analysis technologies support a wide range of applications across failure analysis, silicon validation, technology development, and hardware security.

Failure Analysis

  • Scan chain failure localization
  • Transition fault characterization
  • ATPG failure isolation support
  • Dynamic timing-related failure investigation
  • Intermittent and marginal failure analysis
  • Root cause identification of voltage and timing defects

Design Debug & validation

  • First-silicon validation and debug
  • Functional verification
  • Timing investigation and path analysis
  • Performance bottleneck identification
  • Design-related failure root cause analysis
  • Silicon-to-simulation correlation

Technology development & support

  • Yield ramp acceleration
  • Yield optimization
  • Process characterization
  • Device and technology development support
  • Design-process interaction studies
  • Process monitoring and continuous improvement

Hardware security

  • Functional block identification
  • Data extraction and monitoring
  • Data manipulation studies
  • Reverse engineering support
  • Security vulnerability assessment
  • Hardware trust verification