Dynamic FA & Design Debug
Dynamic analysis using Laser and Ebeam based real time transistor waveform acquisition
Overview
The capacity to enhance yield and reliability relies on thorough defect analysis. Debugging marginal failures at the design level can be particularly difficult, as they often stem from voltage or timing issues within the device. Identifying the root cause of a parametric failure requires pinpointing its exact location inside the device and accessing the relevant circuitry without causing damage or concealing the defects.
Core Technologies
Near Infrared, Visible Lasers and EBeam based techniques are available to extract activity information from an emulated device at transistor level.
Applicable from legacy CMOS technologies down to advance FinFET.

Solutions
The Meridian Product line covers from NIR, Visible down to EBeam Dynamic EFA applications, depending on customer resolution requirements. Probing is doable from 10’s of kHz up to GHz capability. CAD link (NEXS/Avalon) is available for probing location registration .
Meridian IV
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EMMI/LSM system with all static and Dynamic EFA techniques
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NIR Laser Voltage Imaging and Probing (LVI/LVP)
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Targeted for technology down to 22nm
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Resolution down to 220nm
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Datasheet
Meridian EX
EBeam based system with Dynamic EFA Analysis and design Debug Capabilities
EBeam Voltage Imaging and Probing (EVI/EVP)
Targeted for technology below 7nm
Resolution down to 20nm
Meridian 7
LSM based system with both NIR and Visible laser sources
Suited for Dynamic EFA Analysis and design Debug
NIR & Visible (785nm) Laser Voltage Imaging and Probing (LVI/LVP)
Targeted for technology down to 7nm
Resolution down to 140nm
Dynamic analysis applications
Dynamic analysis enable multiple range of applications
Failure Analysis
- Broken scan chain debug
- Transition failure
- ATPG Failure Isolation Support
- Dynamic related Failures
Design Debug & validation
- First silicon debug and validation
- Design related failure
Technology development & support
- Yield ramp up
- Yield optimization
Hardware security
- Functional Block identification
- Data bit extraction
- Data alteration
- Data reading
