Hyperion

 

Integrated & Optimized solution for 10nm

Hyperion is the newest Atomic Force Probing tool; designed and optimized to electrically probe sub-100nm features on semiconductor devices with superior ease-of-use and throughput.

 

 

Advanced Nanoprobing solution

Designed for high productivity electrical failure analysis: probing stability,  efficient fault visualization . Auto tip exchange improved greatly the productivity.

 

 

 



  • Electrical Probing quality - Hyperion Nitrogen Purged Enclosure

There is no oxidation inside the inert atmosphere enclosure.  Cu metal layers remain probe-able for days, with no degradation in conductivity. There is no Cu oxidation during scanning and probing and it reduces oxidation on tungsten tips.

  • Efficient Probing – Tip scanning of up to eight probes

Highly effective fault visualization techniques.

Tapping imaging advantages: High resolution topography images, enables easy contact visualization , facilitates precise probe placement, software controlled via probe icons.

 

Improved Probe Tip Design:

New design enables tapping imaging: Shorter, stiffer cantilever

Accurate, repeatable measurements: Solid tungsten tip micro-welded to stainless steel cantilever

Sub-10nm capable: FIB shaped down to 15nm radius

 

  • Flexible configuration allowing multiple applications
Capacitance - Voltage curve
CV

I-V curves

CT

 

Pulsed I-V

Pulse IV

 

 

Scanning capacitance

 

Pico Current imaging

 

Hot Temperature probing


New features : CAD navigation, improved Scanning Capacitance, Pulsed IV, CV measurement

Contact us if you want more detailed description on our solution

 

 


Hyperion is a FEI EFA group solution

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NproberTM

Integrated & Optimized solution for 22nm

The DCG Systems nProber, flagship product in the NanoWorks® product line, is designed and optimized to electrically probe sub-100nm features on semiconductor devices with superior ease-of-use and throughput.



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