Dprober

A six- position, door-mountable solution

 

 

 

 

The dProber is a standard system mounted on a custom door designed to replace the door of the customer’s Scanning Electron Microscope (SEM) or Focused Ion Beam ( FIB) System.

 

The Door-mounted Analog Probing Solution

The dProber is comprised of a state-of-the-art six positioners Nanomanipulator and XYZ sample stage, a parametric analyzer, an advanced anti-contamination system, an industrial grade load lock, and custom software to control and integrate each component.

 

The dProber incorporates a load lock which allows the DUT to be moved into and out of the system vacuum chamber, and is designed for quick transfer of samples in an ultra-clean environment. The load lock is mounted on a custom-designed DCG door which replaces the standard door of the SEM or FIB system. Our most advanced anti-contamination system rigorously cleans the SEM/FIB, enabling the user to achieve superior ohmic contact.

 

Electrical characterization for device quality and failure analysis

4 to 6 point probing

  DC characterization

  AC characterization

  Bitcell stability (Butterfly curves)

  Kelvin probing

  EBIC/ EBAC characterization option

  CV characterization option

  Temperature characterization option

 

 


dProber is a FEI EFA group solution

 

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DproberTM

A six- position, door-mountable solution

The dProber is a standard system mounted on a custom door designed to replace the door of the customer’s Scanning Electron Microscope (SEM) or Focused Ion Beam (FIB) System.



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