{"id":2719,"date":"2026-05-04T15:46:10","date_gmt":"2026-05-04T13:46:10","guid":{"rendered":"https:\/\/sector-technologies.com\/?page_id=2719"},"modified":"2026-09-01T19:40:00","modified_gmt":"2026-09-01T17:40:00","slug":"nano-probing-v3","status":"publish","type":"page","link":"https:\/\/sector-technologies.com\/index.php\/nano-probing-v3\/","title":{"rendered":"Nano Probing V3"},"content":{"rendered":"\t\t
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Nanoprobing and SEM\/AFM based EFA methods<\/span><\/u><\/b><\/p>\n\n<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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Electrical characterization<\/em><\/span><\/p>

Proven for 2 nm<\/em><\/span><\/p>

Solution for process characterization & failure analysis<\/em><\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t

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Overview<\/span><\/strong><\/span><\/p>\n

Nanoprobing is a solution embedded\u00a0into the failure analysis workflow that is used for precise failure\u00a0localization or characterizing individual transistors or devices down to single\u00a0digit Nanometer technology nodes. There are two principles for probing: Secondary\u00a0Electron beam Microscope (SEM) based systems and Atomic Force Microscopy (AFM) based\u00a0systems. Each has its specific application range. Both system families are\u00a0designed to deliver best in class electrical probing quality with an efficient\u00a0solution package.<\/p>\nCore Technologies<\/span><\/strong><\/span>\n

SEM based systems incorporate high precision probing mechanics and manipulators and which are embedded in state of the art SEMs and operate under vacuum.<\/p>\n

AFM based system use AFM probes that raster the surface of the device for imaging and the same probes are used to electrically characterize it. The Hyperion II allows the operation in an N2 purged environment to minimize surface oxidation.<\/p>\n

These systems are controlled through specific software packages allowing the user to precisely find the location or region of interest (ROI), land the probes precisely and acquire the required electrical response, i.e. I\/V curves, C-V-curves, pulsed probing (possible for both tools set), EBAC\/EBIC, EBIRCH for SEM based systems or pico current imaging and scanning capacitance microscopy (SCM) for AFM-based systems.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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A suite of nanoprobing characterization tools for the semiconductor industry and advanced research markets, including 8 probe systems<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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Solutions<\/span><\/b><\/p>\n\n

A suite of\nnanoprobing characterization tools for the semiconductor industry and advanced\nresearch markets, including up to 8 probe systems<\/span><\/p>\n\n<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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nProber 4 LR<\/strong><\/span><\/p>

SEM based with imaging down to 150eV<\/p>

Proven down to 5nm node<\/p>

Cell counting function<\/p>

8 probes<\/p>

Guided operation<\/p>

-40C up to 150C operation with thermal characterization package<\/p>

Datasheet<\/a><\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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nProber 4 HP<\/strong><\/p>

SEM based with imaging down to 150eV<\/p>

Proven down to 5nm node<\/p>

Cell counting function<\/p>

8 probes<\/p>

Guided operation and automation<\/p>

-40C up to 150C operation with thermal characterization package<\/p>

Datasheet<\/a><\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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Hyperion II<\/strong><\/span><\/p>

AFM based<\/p>

Proven for 5nm<\/p>

4\/6\/8 probes (auto tip exchange)<\/p>

Guided work flow<\/p>

Room temperature up to 100C operation with thermal characterization package<\/p>

Datasheet<\/a><\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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SEM based applications<\/span><\/b><\/span><\/p><\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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SEM nanoProbing enable multiple range of applications<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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DC Characterization<\/strong><\/span><\/p>

Probing multiple transistors within the target area to localize a fault can be time-consuming. The NProber Systems combines SEM imaging with I-V probing to quickly locate the area of interest and measure current-voltage curves.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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CV Characterization<\/strong><\/span><\/p>

C-V is used to study oxide layers, interface traps and charge carrier densities. The nProber Systems offer high-resolution C-V with excellent impedance control, low leakage and very low noise.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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AC Characterization<\/strong><\/span><\/p>

Pulsed I-V or AC measurements are used i.e. to determine signal raise delays of inverter stages.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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Cell Probing<\/strong><\/span><\/p>

The nProber system is equipped with 8 high end manipulators each loaded with ultra sharp probe tips. With this setup the systems allows to fully characterize the switching behavior of a 6T-bitcell (butterfly curves) or logic.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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Temperature Characterization<\/strong><\/span><\/p>

The nProber system can be equipped with a thermal stage that allows device characterization in the temperature range from -40C up to +150C. This is needed for subtle and marginal fails.<\/p>

This allows device characterization with AEC-Q100 (automotive) specs.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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EBAC – EBIRCH<\/strong><\/span><\/p>

The nProber Systems make use of the known SEMs based fault isolation methods EBAC<\/u> (electron beam absorbed current) used to find i.e. metallization opens or shorts , EBIC<\/u> (electron beam induced current) used to localized pn junction related failures ass well as EBIRCH<\/u> (electron beam induced resistance change)\u00a0used to localized shorts in metallization and devices i.e. gate oxide failures in transistors.<\/span><\/p>

\u00a0<\/p>

The latest EBIRCH incorporates in total 12 different CC and CV amplifiers which allow investigation on even harder to localize defects.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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Other<\/strong><\/span><\/p>

The nProber systems have a rather flexible configuration that would allow to place the probes also 3-dimensional structures such as nanowires.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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AFM based applications<\/span><\/b><\/p><\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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AFM nanoProbing enable multiple range of applications<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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Current voltage (I-V) measurements<\/strong><\/span><\/p>

Probing multiple transistors within the target area to localize a fault can be time-consuming. The Hyperion II System combines PicoCurrent imaging with I-V probing to quickly find potential defects and measure current-voltage curves, without introducing measurement-related shifts.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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PicoCurrent<\/strong><\/span><\/p>

PicoCurrent is a conductive AFM scanning technique that allows scan and look for non-analogous responses.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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Capacitance voltage (C-V) measurements<\/strong><\/span><\/p>

C-V is used to study oxide layers, interface traps and charge carrier densities. The Hyperion II System offers high-resolution C-V with excellent impedance control, low leakage and very low noise<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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Pulsed I-V measurements<\/strong><\/span><\/p>

Pulsed I-V or AC measurements are used i.e. to determine signal raise delays of inverter stages or investigate resistive gate isolation failures as well as circuit level probing. As compared to the nProber systems the risetime characterization is a bit slower.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t

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Nanoprobing and SEM\/AFM based EFA methods Electrical characterization Proven for 2 nm Solution for process characterization & failure analysis Overview Nanoprobing is a solution embedded\u00a0into the failure analysis workflow that is used for precise failure\u00a0localization or characterizing individual transistors or devices down to single\u00a0digit Nanometer technology nodes. There are two principles for probing: Secondary\u00a0Electron beam […]<\/p>\n","protected":false},"author":4,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-2719","page","type-page","status-publish","hentry"],"yoast_head":"\nNano Probing V3 - Sector-Technologies<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/sector-technologies.com\/index.php\/nano-probing-v3\/\" \/>\n<meta property=\"og:locale\" content=\"fr_FR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Nano Probing V3\" \/>\n<meta property=\"og:description\" content=\"Nanoprobing and SEM\/AFM based EFA methods Electrical characterization Proven for 2 nm Solution for process characterization & failure analysis Overview Nanoprobing is a solution embedded\u00a0into the failure analysis workflow that is used for precise failure\u00a0localization or characterizing individual transistors or devices down to single\u00a0digit Nanometer technology nodes. 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There are two principles for probing: Secondary\u00a0Electron beam […]","og_url":"https:\/\/sector-technologies.com\/index.php\/nano-probing-v3\/","og_site_name":"Sector-Technologies","article_modified_time":"2026-09-01T17:40:00+00:00","og_image":[{"width":385,"height":223,"url":"https:\/\/sector-technologies.com\/wp-content\/uploads\/2022\/07\/nano1.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_misc":{"Dur\u00e9e de lecture estim\u00e9e":"9 minutes"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/sector-technologies.com\/index.php\/nano-probing-v3\/","url":"https:\/\/sector-technologies.com\/index.php\/nano-probing-v3\/","name":"Nano Probing V3 - Sector-Technologies","isPartOf":{"@id":"https:\/\/sector-technologies.com\/#website"},"primaryImageOfPage":{"@id":"https:\/\/sector-technologies.com\/index.php\/nano-probing-v3\/#primaryimage"},"image":{"@id":"https:\/\/sector-technologies.com\/index.php\/nano-probing-v3\/#primaryimage"},"thumbnailUrl":"https:\/\/sector-technologies.com\/wp-content\/uploads\/2022\/07\/nano1.jpg","datePublished":"2026-05-04T13:46:10+00:00","dateModified":"2026-09-01T17:40:00+00:00","breadcrumb":{"@id":"https:\/\/sector-technologies.com\/index.php\/nano-probing-v3\/#breadcrumb"},"inLanguage":"fr-FR","potentialAction":[{"@type":"ReadAction","target":["https:\/\/sector-technologies.com\/index.php\/nano-probing-v3\/"]}]},{"@type":"ImageObject","inLanguage":"fr-FR","@id":"https:\/\/sector-technologies.com\/index.php\/nano-probing-v3\/#primaryimage","url":"https:\/\/sector-technologies.com\/wp-content\/uploads\/2022\/07\/nano1.jpg","contentUrl":"https:\/\/sector-technologies.com\/wp-content\/uploads\/2022\/07\/nano1.jpg","width":385,"height":223},{"@type":"BreadcrumbList","@id":"https:\/\/sector-technologies.com\/index.php\/nano-probing-v3\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/sector-technologies.com\/"},{"@type":"ListItem","position":2,"name":"Nano Probing V3"}]},{"@type":"WebSite","@id":"https:\/\/sector-technologies.com\/#website","url":"https:\/\/sector-technologies.com\/","name":"Sector-Technologies","description":"Providing Effective Solutions ...","publisher":{"@id":"https:\/\/sector-technologies.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/sector-technologies.com\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"fr-FR"},{"@type":"Organization","@id":"https:\/\/sector-technologies.com\/#organization","name":"Sector-Technologies","url":"https:\/\/sector-technologies.com\/","logo":{"@type":"ImageObject","inLanguage":"fr-FR","@id":"https:\/\/sector-technologies.com\/#\/schema\/logo\/image\/","url":"https:\/\/sector-technologies.com\/wp-content\/uploads\/2022\/07\/logo.png","contentUrl":"https:\/\/sector-technologies.com\/wp-content\/uploads\/2022\/07\/logo.png","width":280,"height":71,"caption":"Sector-Technologies"},"image":{"@id":"https:\/\/sector-technologies.com\/#\/schema\/logo\/image\/"}}]}},"_links":{"self":[{"href":"https:\/\/sector-technologies.com\/index.php\/wp-json\/wp\/v2\/pages\/2719","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/sector-technologies.com\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/sector-technologies.com\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/sector-technologies.com\/index.php\/wp-json\/wp\/v2\/users\/4"}],"replies":[{"embeddable":true,"href":"https:\/\/sector-technologies.com\/index.php\/wp-json\/wp\/v2\/comments?post=2719"}],"version-history":[{"count":64,"href":"https:\/\/sector-technologies.com\/index.php\/wp-json\/wp\/v2\/pages\/2719\/revisions"}],"predecessor-version":[{"id":3066,"href":"https:\/\/sector-technologies.com\/index.php\/wp-json\/wp\/v2\/pages\/2719\/revisions\/3066"}],"wp:attachment":[{"href":"https:\/\/sector-technologies.com\/index.php\/wp-json\/wp\/v2\/media?parent=2719"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}